Hitachi Wafer Alignment Unit with SunX Laser Line Controller FEM-312 EFEM Used Removed from a DNS Dainippon

Removed from a DNS Dainippon Screen FC-3000 Wet Station System This KEL VPDEST2250 VMEBus J2 3-Slot Backplane PCB is used working surplus

Inventory # A-11450

Part No: SEC-410-AV

Inventory # 14274

Hitachi Wafer Alignment Unit with SunX Laser Line Controller FEM-312 EFEM Used Removed from a DNS DainipponHitachi Wafer Alignment Unit with SunX Laser Line Controller FEM 312 EFEM Used Inventory # A 12824 This Hitachi Wafer Alignment Unit with SunX Laser Line Controller FEM 312 EFEM is used working surplus. The physical condition is good, but there are signs of previous use and handling. Specifications Part No: Alignment Unit Configured for 300mm Wafers Removed from a Hitachi FEM 312 EFEM Equipment Front End Module Installed Components Hitachi PCB Part